Author:
Nguyen Jean,Gill John,Rafol Sir B.,Soibel Alexander,Khoshakhlagh Arezou,Ting David,Keo Sam,Fisher Anita,Luong Edward,Liu John,Mumolo Jason,Gunapala Sarath D.
Cited by
2 articles.
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1. Investigation of ICP dry etching of InAs/GaSb type-II superlattice LWIR photodetector;Infrared Technology and Applications XLVII;2021-04-12
2. Inductively coupled plasma reactive ion etching of GaAs wafer pieces with enhanced device yield;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2014-03