Ultra-fast aerial image simulation algorithm using wavelength scaling and fast Fourier transformation to speed up calculation by more than three orders of magnitude-Reference-Cited by-同舟云学术

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Ultra-fast aerial image simulation algorithm using wavelength scaling and fast Fourier transformation to speed up calculation by more than three orders of magnitude

Published:2023-06-14 Issue:02 Volume:22 Page:
ISSN:2708-8340
Container-title:Journal of Micro/Nanopatterning, Materials, and Metrology
language:
Short-container-title:J. Micro/Nanopattern. Mats. Metro.

Author:

Gau Tsai-Sheng¹,Chen Po-Hsiung¹,Lin Burn J.¹,Ko Fu-Hsiang²,Chen Chun-Kung³,Yen Anthony⁴

Affiliation:

1. National Tsinghua University, College of Semiconductor Research, Hsinchu, Taiwan

2. National Yang Ming Chiao Tung University, Department of Material Science and Engineering, Hsinchu, Taiwan

3. ASML Technology Development Center, Hsinchu, Taiwan

4. ASML Technology Development Center, San Jose, California, United States

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Arts and Humanities

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