Author:
Shishova Maria,Odinokov Sergey B.,Lushnikov Dmitriy S.,Zherdev Alexander Y.
Reference8 articles.
1. SPIE Handbook of Microlithography, Micromachining and Microfabrication Volume 1: Microlithography;Rai-Choudhury,1997
2. Mathematical modeling of signal transfer process into linear displacement encoder optical system;Shishova,2017
3. Measurement technologies for precision positioning
4. Ultra-precision engineering in lithographic exposure equipment for the semiconductor industry
5. Analysis of Signal Distortion Caused by Opening Ratio Variation of Main Scale And Index Scale in Linear Encoder;Li,2013
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献