Improved measurement performance of the Physikalisch-Technische Bundesanstalt nanometer comparator by integration of a new Zerodur sample carriage-Reference-Cited by-同舟云学术

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Improved measurement performance of the Physikalisch-Technische Bundesanstalt nanometer comparator by integration of a new Zerodur sample carriage

Published:2014-05-22 Issue:12 Volume:53 Page:122404
ISSN:0091-3286
Container-title:Optical Engineering
language:en
Short-container-title:Opt. Eng

Author:

Flügge Jens,Köning Rainer,Schötka Eugen,Weichert Christoph,Köchert Paul,Bosse Harald,Kunzmann Horst

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

Reference12 articles.

1. Current Status in, and Future Trends of, Ultraprecision Machining and Ultrafine Materials Processing

2. The Role of Precision Engineering in Manufacturing of the Future

3. International technology roadmap for semiconductors

4. Practical realization of the definition of the metre, including recommended radiations of other optical frequency standards (2003)

5. Achievement of sub nanometer reproducibility in line scale measurements with the nanometer comparator

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