Method to calculate the error correction ability of tool influence function in certain polishing conditions-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Method to calculate the error correction ability of tool influence function in certain polishing conditions

Published:2014-07-25 Issue:7 Volume:53 Page:075106
ISSN:0091-3286
Container-title:Optical Engineering
language:en
Short-container-title:Opt. Eng

Author:

Wang Jia¹,Fan Bin²,Wan Yongjian³,Shi Chunyan²,Zhuo Bin²

Affiliation:

1. Chinese Academy of Sciences, Institute of Optics and Electronics, Chengdu 610209, ChinabUniversity of Chinese Academy of Sciences, Beijing 100039, China

2. Chinese Academy of Sciences, Institute of Optics and Electronics, Chengdu 610209, China

3. Chinese Academy of Sciences, Institute of Optics and Electronics, Chengdu 610209, ChinacState Key Laboratory of Optical Technology for Micro-fabrication, Chengdu 610209, China

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Analysis of low-spatial frequency response in magnetorheological finishing process;Optifab 2023;2023-11-30

2. Mid-high-frequency error suppression of small optical aspheric molds;Applied Optics;2023-04-03

3. Statistical Tool Size Study for Computer-Controlled Optical Surfacing;Photonics;2023-03-09

4. Parametric Tool Influence Function Size Optimization;OSA Optical Design and Fabrication 2021 (Flat Optics, Freeform, IODC, OFT);2021

5. Research on controlling middle spatial frequency error of high gradient precise aspheric by pitch tool;SPIE Proceedings;2016-11-03

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP