1. Missouri University of Science and Technology, Photonics Technology Laboratory, Department of Electrical and Computer Engineering, 1870 Miner Circle, Rolla, Missouri 65409-0040
2. Missouri University of Science and Technology, Applied Optics Laboratory, Department of Electrical and Computer Engineering, 1870 Miner Circle, Rolla, Missouri 65409-0040
3. Missouri University of Science and Technology, Photonics Technology Laboratory, Department of Electrical and Computer Engineering, 1870 Miner Circle, Rolla, Missouri 65409-0040cBeijing Institute of Technology, Laser Micro/Nano Fabrication Laboratory, Scho