Segmented subwavelength silicon gratings manufactured by high productivity microelectronic technologies for linear to radial/azimuthal polarization conversion-Reference-Cited by-同舟云学术

Segmented subwavelength silicon gratings manufactured by high productivity microelectronic technologies for linear to radial/azimuthal polarization conversion

Published:2014-10-08 Issue:10 Volume:53 Page:107105
ISSN:0091-3286
Container-title:Optical Engineering
language:en
Short-container-title:Opt. Eng

Author:

Kämpfe Thomas¹,Sixt Pierre²,Renaud Denis²,Lagrange Armelle²,Perrin Fabrice²,Parriaux Olivier¹

Affiliation:

1. Université de Lyon à St-Etienne, Laboratoire Hubert Curien UMR CNRS 5516, 18 Rue du Professeur Benoît Lauras, 42000 Saint-Etienne, France

2. Laboratoire d’électronique et de technologie de l’information CEA/Léti, 17 Rue des Martyrs, 38054 Grenoble, France

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

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