1. Chinese Academy of Sciences, Institute of Electronics, Department of High Power Gas Laser, No. 19 North 4th Ring Road West, Beijing 100190, China
2. Chinese Academy of Sciences, Institute of Electronics, Department of High Power Gas Laser, No. 19 North 4th Ring Road West, Beijing 100190, ChinabUniversity of Chinese Academy of Sciences, No. 19A Yuquan Road, Beijing 10049, China
3. Tsinghua University, Department of Electronic Engineering, Beijing 100084, China