FDSOI transistor-based uncooled microbolometer: demonstration of a 12µm pixel sensitive to IR flux

Author:

Albouy Antoine,Dumont Geoffroy,Le Cocq Mélanie,Vialle Claire,Kubica Romain M.R.,Carle Laurent,Goudon Valérie,Perrillat-Bottonet Thomas,Yon Jean-Jacques,Leduc Patrick

Publisher

SPIE

Reference10 articles.

1. History of infrared detectors

2. Advancements of uncooled infrared microbolometer materials: A review

3. Development of new soi diode structure for beyond 17 um pixel pitch soi diode uncooled irfpas;Takamuro;Infrared Technology and Applications,2011

4. 2-in-1 diodes with a contact-sidewall structure for small pixel pitch in silicon-on-insulator (soi) uncooled infrared (ir) focal plane arrays;Maegawa;Sensors and Materials,2014

5. Development of shutter-less soi diode uncooled irfpa for compact size and low power consumption;Fujisawa;Infrared Technology and Applications,2019

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