Atomic force microscopy electrostatic nanolithography (AFMEN): a versatile tool for nano-patterning in thin films and beyond
-
Published:2023-02-01
Issue:
Volume:
Page:
-
ISSN:
-
Container-title:International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors 2022
-
language:
-
Short-container-title:
Author:
Lyuksyutov Sergei F.