<title>Microspectrometer system for the near-infrared wavelength range based on LIGA technology

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Microspectrometer system for the near-infrared wavelength range based on LIGA technology

Published:2000-03-15 Issue: Volume: Page:
ISSN:0277-786X
Container-title:Micro- and Nanotechnology for Biomedical and Environmental Applications
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Author:

Krippner Peter,Kuehner Thomas,Mohr Juergen,Saile Volker

Publisher

SPIE

Cited by 15 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Optical System Design of a Planar Waveguide Spectrometer;Coatings;2022-04-12

2. Portable Spectroscopy;Applied Spectroscopy;2018-10-18

3. Micromanufacturing: A review—Part I;Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture;2014-08-01

4. Design and Characterization of Fabry–Pérot MEMS-Based Short-Wave Infrared Microspectrometers;Journal of Electronic Materials;2008-08-08

5. Investigation and characterization of highly efficient near-infrared scanning gratings used in near-infrared microspectrometers;Journal of Micro/Nanolithography, MEMS, and MOEMS;2008-04-01

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