Modeling of surface roughness in deeply etched photonic MEMS mirrors and filters-Reference-Cited by-同舟云学术

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Modeling of surface roughness in deeply etched photonic MEMS mirrors and filters

Published:2022-11-29 Issue:11 Volume:61 Page:
ISSN:0091-3286
Container-title:Optical Engineering
language:
Short-container-title:Opt. Eng.

Author:

Mostafa Ahmed¹,Sabry Yasser M.²,Omran Haitham³,El-Nashar Hassan F.¹,Samir Ahmed¹,Khalil Diaa²

Affiliation:

1. Ain Shams University, Physics Department, Faculty of Science, Cairo, Egypt

2. Ain Shams University, Electrical Communication Department, Faculty of Engineering, Cairo, Egypt

3. German University in Cairo, Faculty of Information Engineering and Technology, Cairo, Egypt

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

Reference18 articles.

1. Analysis of a fiber-optic deep-etched silicon Fabry–Perot temperature sensor and modeling its fabrication imperfections

2. Free-Space Tunable and Drop Optical Filters Using Vertical Bragg Mirrors on Silicon

3. Spectroscopic Gas Sensing Based on a MEMS-SOA Swept Fiber Laser Source

4. Optical coherence tomography using a frequency-tunable optical source

5. Deeply-Etched Optical MEMS Tunable Filter for Swept Laser Source Applications

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Modeling and analysis of nonuniform metal-coating of deeply-etched vertical micromirrors;MOEMS and Miniaturized Systems XXIII;2024-03-12

2. Measurements and analysis of spectrally resolved spot profile of diffuse reflection micro spectrometers using knife-edge white reference;Photonic Instrumentation Engineering XI;2024-03-11

3. Characterization of high aspect ratio miniature reflectors using negative shape polymer filling and image processing;Photonic Instrumentation Engineering XI;2024-03-11

4. Fourier Optics Modeling of Deeply Etched Silicon Cavities with Submillimeter Gap for Optical Sensing Applications;Optica Sensing Congress 2023 (AIS, FTS, HISE, Sensors, ES);2023

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