Optical path modulation of interference fringe density based on position errors analysis in oblique laser interferometry-Reference-Cited by-同舟云学术

Optical path modulation of interference fringe density based on position errors analysis in oblique laser interferometry

Published:2022-12-27 Issue:12 Volume:61 Page:
ISSN:0091-3286
Container-title:Optical Engineering
language:
Short-container-title:Opt. Eng.

Author:

Yang Pengcheng¹,Lian Liping¹,Yu Zijian¹,Xiao Yuan¹,Zhu Xindong²

Affiliation:

1. Xi’an Polytechnic University, Mechanical and Electrical Engineering College, Xi’an, China

2. Xi’an Jiaotong University, School of Physics, Ministry of Education Key Laboratory for Nonequilibrium Synthesis and Modulation of Condensed Matter, Shaanxi Province Key Laboratory of Quantum Information and Quantum Optoelectronic Devices, Xi’an, Chin

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

Reference17 articles.

1. A review of interferometry for geometric measurement

2. Shield analysis and non-rigid match in positioning the actual interferogram on the tooth flank based on oblique incidence interferometry

3. Design and Development of Oblique-Incident Interferometer for Form Measurement of Hand-Scraped Surfaces

4. Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances

5. Simultaneous dual-wavelength phase-shifting interferometry for surface topography measurement

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