HfO2/SiO2 nanolaminate-based composites prepared by ion beam sputtering for low-loss optics
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Published:2021-11-25
Issue:03
Volume:61
Page:
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ISSN:0091-3286
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Container-title:Optical Engineering
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language:
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Short-container-title:Opt. Eng.
Author:
Niu Xinshang1,
Jiao Hongfei1,
Ma Bin1,
Zhang Jinlong1,
Cheng Xinbin1,
Wang Zhangshan1
Affiliation:
1. Ministry of Education, Key Laboratory of Advanced Micro-Structured Materials, Shanghai
Funder
National Natural Science Foundation of China
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics