Author:
Galler R.,Choi K.-H.,Gutsch M.,Hohle C.,Krueger M.,Ramos L. E.,Suelzle M.,Weidenmueller U.
Cited by
1 articles.
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1. Model based hybrid proximity effect correction scheme combining dose modulation and shape adjustments;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2011-11