1. The future of EUV lithography: enabling Moore’s law in the next decade;Pirati,2017
2. Current challenges and opportunities for EUV lithography;Levinson,2018
3. 0.33 NA EUV systems for high volume manufacturing;Smeets,2023
4. Metrics for stochastic scaling in EUV lithography;Mack,2019
5. Will Stochastics be the ultimate limiter for nanopatterning?;Mack,2019