Author:
Shirasaki Yasuhiro,Shoji Minami,Nakamura Yohei,Yachi Kazufumi,Takada Satoshi,Tsuno Natsuki
Reference6 articles.
1. Laser assisted SEM for visualizing electrical property using voltage contrast dynamics;Shoji,2023
2. Electrical characterization and inspection of contact plugs using laser-assisted SEM;Shoji,2024
3. Laser assisted SEM for high spatial resolution material metrology and inspection;Shirasaki,2023
4. Internal Photoemission Spectroscopy Methods
5. (Invited) Spectroscopy of Deep Gap States in High-k Insulators