Optical position encoder based on four-section diffraction grating-Reference-Cited by-同舟云学术

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Optical position encoder based on four-section diffraction grating

Published:2017-05-15 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
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Author:

Zherdev A. Y.¹,Odinokov S. B.¹,Lushnikov D. S.¹,Markin V. V.¹,Gurylev O. A.¹,Shishova M. V.¹

Affiliation:

1. Bauman Moscow State Technical Univ. (Russian Federation)

Publisher

SPIE

Reference5 articles.

1. Linear Optical Encoder System With Sinusoidal Signal Distortion Below $-$60 dB

2. Technology and Applications of Grating Interferometers in High-Prescision Measurement;Teimel;Precision Engineering,1992

3. A Study on the Fabrication of Main Scale Of Linear Encoder Using Continuous Roller Imprint Method;Fan,2013

4. Model of Diffraction of Radiation on Grating in Arbitrary Coordinate System for Element’s Displacement Analysis in Optical Systems;Zherdev,2016

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Displacement measuring grating interferometer: a review;Frontiers of Information Technology & Electronic Engineering;2019-05

2. Special structuring of diffraction gratings for optical position encoder;Digital Holography and Three-Dimensional Imaging 2019;2019

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