Design of SiN waveguide reference wave source for point diffraction interferometer-Reference-Cited by-同舟云学术

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Design of SiN waveguide reference wave source for point diffraction interferometer

Published:2020-06-15 Issue: Volume: Page:
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Container-title:Optical Technology and Measurement for Industrial Applications 2020
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Author:

Chen Yuankai,Yang Yongying,Wang Chen,Li Yao,Liang Zijian,Zhao Hongyang,Liu Shengan,Bai Jian

Publisher

SPIE

Reference6 articles.

1. A simple interferometer for testing optical systems;Linnik;Acad. Sci. URSS.,1933

2. Theory and Application of Point-Diffraction Interferometers

3. Analysis of diffraction wavefront in visible-light point-diffraction interferometer

4. Absolute measurement of spherical surface by point diffraction interferometer;Otaki,1999

5. High-NA fiber point-diffraction interferometer for three-dimensional coordinate measurement

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