Performance validation of Mapper FLX-1200-Reference-Cited by-同舟云学术

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Performance validation of Mapper FLX-1200

Published:2018-09-19 Issue: Volume: Page:
ISSN:
Container-title:34th European Mask and Lithography Conference
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Author:

Pain Laurent,Blancquaert Yoann,Pradelles Jonathan,Landis Stefan,Rademaker Guido,Servin Isabelle,De Boer Guido,Brandt Pieter,Dansberg Michel,Jager Remco,Peijster Jerry J.,Slot Erwin,Steenbrink Stijn,Wieland Marco

Publisher

SPIE

Reference22 articles.

1. MAGIC: a European program to push the insertion of maskless lithography;Pain,2008

2. IMAGINE: an open consortium to boost maskless lithography take off First assessment results on MAPPER technology;Pain,2011

3. Throughput enhancement technique for MAPPER maskless lithography;Wieland,2010

4. Handling, clamping and alignment evaluation for Multi-beam technology on Matrix1.1 platform;Lattard,2014

5. Performances validation of FLX-1200;Wieland,2018

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