Toward 17Âµm pitch heterogeneously integrated Si/SiGe quantum well bolometer focal plane arrays-Reference-Cited by-同舟云学术

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Toward 17Âµm pitch heterogeneously integrated Si/SiGe quantum well bolometer focal plane arrays

Published:2011-05-13 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Ericsson Per,Fischer Andreas C.,Forsberg Fredrik,Roxhed Niclas,Samel Björn,Savage Susan,Stemme Göran,Wissmar Stanley,Öberg Olof,Niklaus Frank

Publisher

SPIE

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Improved Responsivity of an a-Si-based Micro-bolometer Focal Plane Array with a SiNx Membrane Layer;JOURNAL OF SENSOR SCIENCE AND TECHNOLOGY;2022-11-30

2. Design of monocrystalline Si/SiGe multi-quantum well microbolometer detector for infrared imaging systems;Infrared Technology and Applications XLII;2016-05-20

3. Focal Plane Arrays for Optical Payloads;Optical Payloads for Space Missions;2015-11-20

4. Void-free wafer-level adhesive bonding utilizing modified poly (diallyl phthalate);Journal of Micromechanics and Microengineering;2013-11-14

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