Novel MRF fluid for ultra-low roughness optical surfaces-Reference-Cited by-同舟云学术

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Novel MRF fluid for ultra-low roughness optical surfaces

Published:2014-08-06 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
Short-container-title:

Author:

Dumas Paul,McFee Charles

Publisher

SPIE

Reference9 articles.

1. SEMI P37-1102: Specification for extreme ultraviolet lithography mask substrates

2. Ultra-low roughness magneto-rheological finishing for EUV mask substrates

3. Alternative smoothing techniques to mitigate EUV substrate defectivity;House,2012

4. Magnetorheological finishing (MRF) in commercial precision optics manufacturing;Golini,1999

5. High precision polishing of EUV photoblanks with magneto-rheological finishing (MRF);Tricard,2002

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Design and manufacturing of a metallic telescope for ground-based quantum communication;Optical Fabrication and Testing VIII;2024-06-17

2. High-Efficiency Chemical-Mechanical Magnetorheological Finishing for Ultra-Smooth Single-Crystal Silicon;Nanomaterials;2023-01-18

3. Prediction of surface roughness and the material removal rate in magnetorheological finishing;Optics Express;2022-12-05

4. Investigation on the smoothing of surface spatial frequency errors for borosilicate glass by heat-treatment;Journal of Manufacturing Processes;2021-08

5. Experimental investigation on thermal healing of subsurface damage in borosilicate glass;Ceramics International;2021-06

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