The ALS OSMS: Optical Surface Measuring System for high accuracy two-dimensional slope metrology with state-of-the-art x-ray mirrors-Reference-Cited by-同舟云学术

The ALS OSMS: Optical Surface Measuring System for high accuracy two-dimensional slope metrology with state-of-the-art x-ray mirrors

Published:2018-09-17 Issue: Volume: Page:
ISSN:
Container-title:Advances in X-Ray/EUV Optics and Components XIII
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Author:

Lacey Ian,Anderson Kevan,Centers Gary P.,Geckeler Ralf D.,Gevorkyan Gevork S.,Grossiord John,Just Andreas,Nicolot Theo,Smith Brian V.,Yashchuk Valeriy V.

Publisher

SPIE

Reference64 articles.

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2. [ALS-U: Solving Scientific Challenges with Coherent Soft X-Rays];Kevan,2017

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4. X-ray Mirrors;Assoufid,2013

5. Specification of x-ray mirrors in terms of system performance: A new twist to an old plot;Yashchuk,2014

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