Swing arm profilometer: high accuracy testing for large reaction-bonded silicon carbide optics with a capacitive probe-Reference-Cited by-同舟云学术

Swing arm profilometer: high accuracy testing for large reaction-bonded silicon carbide optics with a capacitive probe

Published:2017-08-04 Issue:8 Volume:56 Page:084101
ISSN:0091-3286
Container-title:Optical Engineering
language:en
Short-container-title:Opt. Eng

Author:

Xiong Ling¹,Luo Xiao²,Hu Hai-xiang¹,Zhang Zhi-yu²,Zhang Feng²,Zheng Li-gong²,Zhang Xue-jun²

Affiliation:

1. Changchun Institute of Optics, Fine Mechanics and Physics, Key Laboratory of Optical System Advanced Manufacturing Technology, Chinese Academy of Sciences, Changchun, ChinabUniversity of Chinese Academy of Sciences, Beijing, China

2. Changchun Institute of Optics, Fine Mechanics and Physics, Key Laboratory of Optical System Advanced Manufacturing Technology, Chinese Academy of Sciences, Changchun, China

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

Reference14 articles.

1. A versatile profilometer for aspheric optics;Anderson,1990

2. Swing-arm profilometry of aspherics

3. Swing arm optical CMM for aspherics

4. Fabrication and testing of 1.4-m convex off-axis aspheric optical surfaces

5. Verification of image orthorectification techniques for low-cost geometric inspection of masonry arch bridges

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