Effects of sputtering parameters and separator plates on the structure and stress of W/Si multilayers in x-ray telescope applications
Author:
Affiliation:
1. Tongji University, Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Shanghai, China
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics
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