Suppression of span in sealed microcavity Fabry–Perot pressure sensors-Reference-Cited by-同舟云学术

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Suppression of span in sealed microcavity Fabry–Perot pressure sensors

Published:2017-01-06 Issue:1 Volume:56 Page:016105
ISSN:0091-3286
Container-title:Optical Engineering
language:en
Short-container-title:Opt. Eng

Author:

Mishra Shivam¹,Rajappa Balasubramaniam¹,Chandra Sudhir²

Affiliation:

1. Homi Bhabha National Institute, Mumbai 400094, IndiabBhabha Atomic Research Centre, Precision Engineering Division, Mumbai 400085, India

2. Bennett University, Electronics and Communication Department, Plot No. 8-11, Tech Zone-II, Greater Noida 201310, Uttar Pradesh, India

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

Reference39 articles.

1. Pressure sensors;Fraden,2016

2. High-Temperature Piezoelectric Sensing

3. A critical review of MEMS capacitive pressure sensors;Kirankumar,2015

4. MEMS capacitive pressure sensors: a review on recent development and prospective;Eswaran,2013

5. The Piezoresistive Effect of SiC for MEMS Sensors at High Temperatures: A Review

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fabry–Perot Interferometer-Based Absolute Pressure Sensor With Stainless Steel Diaphragm;IEEE Sensors Journal;2019-08-01

2. Finite element analysis and experimental validation of suppression of span in optical MEMS pressure sensors;Microsystem Technologies;2019-02-19

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