Microlaser assisted diamond turning of precision silicon optics
Author:
Affiliation:
1. Micro-LAM Inc., Portage, Michigan
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics
Reference26 articles.
1. Diamond Turning of Optics: The Past, the Present, and the Exciting Future
2. Application of precision diamond machining to the manufacture of microphotonics components
3. Manufacturing and measurement of freeform optics
4. Chemical aspects of tool wear in single point diamond turning
5. International Status of Thermal Error Research (1990)
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2. Finite element simulation and experimental investigation of in-situ laser-assisted diamond turning of monocrystalline silicon;Semiconductor Science and Technology;2024-04-30
3. Ductile mode machining of piezoelectric single crystal by laser-assisted diamond turning process;Journal of Materials Research and Technology;2024-03
4. Effect of temperature on the ductile-to-brittle transition in laser-assisted mechanical ruling of silicon;Materials Science in Semiconductor Processing;2024-03
5. Precision tailoring of laser beam propagation in a single crystalline diamond tool for in situ laser-assisted diamond turning;Applied Optics;2023-12-21
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