Inspection of hidden MEMS by an infrared low-coherence interferometric microscope-Reference-Cited by-同舟云学术

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Inspection of hidden MEMS by an infrared low-coherence interferometric microscope

Published:2018-08-18 Issue: Volume: Page:
ISSN:
Container-title:Interferometry XIX
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Author:

Krauter Johann,Osten Wolfgang

Publisher

SPIE

Reference43 articles.

1. Invention of the integrated circuit

2. Silicon as a mechanical material

3. A brief history of the term Micro Electro Mechanical Systems (MEMS);Wood,2016

4. Future of MEMS: a Market & Technolgies Perspective;Mounier,2014

5. Die Zahl der Sensoren wird weiter exponentiell wachsen;Arnold,2014

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Characterization of the dynamics of encapsulated silicon MEMS devices using low-coherence heterodyne LDV technology;Micro and Nano Engineering;2023-06

2. Broadband GaAsSb Nanowire Array Photodetectors for Filter-Free Multispectral Imaging;Nano Letters;2021-08-23

3. Topografiemessung an verkapselten mikroelektromechanischen Systemen mittels Kurzkohärenz-Interferometrie;tm - Technisches Messen;2019-03-09

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