Optical Proximity Correction
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3 articles.
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1. Advanced Optical Masks;Handbook of Photomask Manufacturing Technology;2005-04-07
2. Mutual optimization of resolution enhancement techniques;Journal of Micro/Nanolithography, MEMS, and MOEMS;2002-07-01
3. Linewidth variation characterization by spatial decomposition*;Journal of Micro/Nanolithography, MEMS, and MOEMS;2002-07-01