Publisher
SPIE-Intl Soc Optical Eng
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference19 articles.
1. HEIGHTS initial simulation of discharge-produced plamsa hydrodynamics and radiation transport for EUV lithography
2. HEIGHTS initial simulation of discharge produced plasma hydrodynamics and radiation transport for extreme ultraviolet lithography
3. Simulation and optimization of DPP hydrodynamics and radiation transport for EUV lithography devices
4. V. Morozov, V. Sizyuk, A. Hassanein, and V. Tolkach , “Simulation of discharge produced plasma and EUV radiation in various Z-pinch devices,” ANL Report ANL-ET-04/31, Argonne National Laboratory, Argonne, IL (2004).
5. K. Takenoshita, C.S. Koay, S. Teerawattansook, M. Richardson, and V. Bakshi , “Ion emission characterization from microscopic laser-plasma Sn-doped droplet sources,” 3rd Intl. Extreme Ultraviolet Symp. 1-4 November, Miyazaki, Japan (2004).
Cited by
17 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献