Author:
Zhang Xiangchao,Zheng Shaonan,Zhong Qize,Jia Lianxi,Xu Zhengji,Dong Yuan,Hu Ting,Gu Yuandong
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Patterning of Sc0.3Al0.7N Film for Piezoelectric MEMS Devices;2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF);2023-07-23
2. Dawn of nitride ferroelectric semiconductors: from materials to devices;Semiconductor Science and Technology;2023-03-06
3. Double-tip Scandium Aluminum Nitride Edge Couplers at 1550 nm Wavelength;2022 IEEE 7th Optoelectronics Global Conference (OGC);2022-12-06