Surface modification of silicon by femtosecond laser ablation in liquid
Author:
Publisher
SPIE
Reference21 articles.
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1. Microfabrication of Sm2Co17 micromagnets for MEMS and micromotors using ultrashort pulsed hydro laser micromilling process;The International Journal of Advanced Manufacturing Technology;2023-11-13
2. Realization of High Aspect Ratio Anti-reflection Structures via Laser Irradiation inside Liquid;Journal of Laser Micro/Nanoengineering;2023-06
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