The Blazing Of Holographic Gratings Using Ion-Etching
Author:
Affiliation:
1. Jobin Yvon Div D'instruments S.A (France)
2. Instruments S.A. Inc (United States)
Publisher
SPIE
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Multi-Repeated Projection Lithography for High-Precision Linear Scale Based on Average Homogenization Effect;Sensors;2016-04-14
2. Practical method study on correcting yaw error of 500 mm grating blank carriage in real time;Applied Optics;2015-04-27
3. Real-time monitoring of ruling grating resolution by digital wavefront;Applied Optics;2015-01-15
4. High-end spectroscopic diffraction gratings: design and manufacturing;Advanced Optical Technologies;2015-01-01
5. Reducing the line curvature error of mechanically ruled gratings by interferometric control;Applied Physics B;2014-04-22
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