Characterizing Si x N y absorbers and support beams for far-infrared/submillimeter transition-edge sensors-Reference-Cited by-同舟云学术

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Characterizing Si x N y absorbers and support beams for far-infrared/submillimeter transition-edge sensors

Published:2010-07-16 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Beyer A. D.,Kenyon M. E.,Echternach P. M.,Eom B.-H.,Bueno J.,Day P. K.,Bock J. J.,Bradford C. M.

Publisher

SPIE

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