<title>Nonlinear flexures for stable deflection of an electrostatically actuated micromirror

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Nonlinear flexures for stable deflection of an electrostatically actuated micromirror

Published:1997-09-02 Issue: Volume: Page:
ISSN:0277-786X
Container-title:Microelectronic Structures and MEMS for Optical Processing III
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Author:

Burns David M.,Bright Victor M.

Publisher

SPIE

Cited by 35 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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