Fabrication of three-dimensional millimeter-height structures using direct ultraviolet lithography on liquid-state photoresist for simple and fast manufacturing
Author:
Affiliation:
1. University of Pennsylvania, Department of Electrical and Systems Engineering, Philadelphia, Pennsylvania 19104, United States
2. University of Florida, Department of Electrical and Computer Engineering, Gainesville, Florida 32611, United States
Publisher
SPIE-Intl Soc Optical Eng
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
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