Fabrication and characterization of an all optically addressed micromirror array-Reference-Cited by-同舟云学术

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Fabrication and characterization of an all optically addressed micromirror array

Published:2015-01-20 Issue:1 Volume:14 Page:015501
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Mathur Vaibhav¹,Vangala Shiva²,Khoury Jed³

Affiliation:

1. University of Massachusetts Lowell, Photonics Center, Lowell, Massachusetts 01854, United States

2. Solid State Scientific Corporation, Nashua, New Hampshire 03060, United StatescAir Force Research Laboratory, Sensors Directorate, WPAFB, Ohio 45433, United States

3. Air Force Research Laboratory, Sensors Directorate, WPAFB, Ohio 45433, United States

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference23 articles.

1. Segmented silicon-micromachined microelectromechanical deformable mirrors for adaptive optics

2. Single-Crystal-Silicon Continuous Membrane Deformable Mirror Array for Adaptive Optics in Space-Based Telescopes

3. MEMS deformable mirrors for astronomical adaptive optics

4. Segmented silicon-micromachined microelectromechanical deformable mirrors for adaptive optics

5. Electrostatic micro torsion mirrors for an optical switch matrix

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