Author:
Chopra Meghali J.,Bonnecaze Roger T.
Publisher
SPIE-Intl Soc Optical Eng
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
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1. Optimal placement of droplets for UV nanoimprint lithography;Journal of Vacuum Science & Technology B;2020-03
2. Effect of droplet size, droplet placement, and gas dissolution on throughput and defect rate in UV nanoimprint lithography;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2017-01