Research of the microelectromechanical switch with diﬀerent materials of metal membrane-Reference-Cited by-同舟云学术

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Research of the microelectromechanical switch with diﬀerent materials of metal membrane

Published:2019-03-15 Issue: Volume: Page:
ISSN:
Container-title:International Conference on Micro- and Nano-Electronics 2018
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Author:

Tkachenko Alexey,Lysenko Igor,Ezhova Olga

Publisher

SPIE

Reference38 articles.

1. MEMS for Mobile MEMS for Cell Phones and Tablets report;Robin;Yole Developpement, Tech. Rep.,2015

2. Status of the MEMS Industry. Market & Technology report;Robin;Yole Developpement, Tech. Rep.,2017

3. RF MEMS switches and switch circuits

4. Design and simulation of simple and varying section cantilever and fixed-fixed end types MEMS switches;Afrangand,2004

5. Electromechanical considerations in developing low-voltage RF MEMS switches

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Research of the Microelectromechanical Device Cross-Shaped Element;Springer Proceedings in Physics;2022

2. The modeling design integral the electrostatic microelectromechanical switch of capacitive type;ITM Web of Conferences;2019

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