Author:
Satoh Hidetoshi,Nakayama Yoshinori,Saitou Norio,Kagami T.
Cited by
5 articles.
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1. Photomask Fabrication;Handbook of Semiconductor Manufacturing Technology, Second Edition;2007-07-09
2. E-Beam Mask Writers;Handbook of Photomask Manufacturing Technology;2005-04-07
3. Masks for Electron Beam Projection Lithography;Handbook of Photomask Manufacturing Technology;2005-04-07
4. Stencil mask fabrication for cell projection e-beam lithography with silicon wafer;SPIE Proceedings;1999-08-25
5. Highly accurate cell projection mask for applications to sub-130 nm patterning;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1999