Quantitative tomography with subsurface scanning ultrasound resonance force microscopy

Author:

van Es Maarten H.,Fillinger Laurent,Sadeghian Hamed

Publisher

SPIE

Reference13 articles.

1. Mapping buried nanostructures using subsurface ultrasonic resonance force microscopy

2. Simulating massively parallel electron beam inspection for sub-20 nm defects;Bunday,2015

3. Metrology and Diagnostic Techniques for Nanoelectronics

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5. The Benefits of High Landing Energy for E-Beam Inspection

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2. High resolution acoustic metrology by combining high GHZ frequency ultrasound and scanning probe microscopy;Metrology, Inspection, and Process Control for Microlithography XXXIV;2020-03-20

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