Advanced metrology: an essential support for the surface finishing of high performance x-ray optics
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SPIE
Cited by 25 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Two-dimensional speckle technique for slope error measurements of weakly focusing reflective X-ray optics;Journal of Synchrotron Radiation;2022-10-05
2. X射线柱面反射镜的非零位干涉测量;Acta Optica Sinica;2022
3. Measurement of Freeform Optical Surfaces: Trade-Off between Accuracy and Dynamic Range;Laser & Photonics Reviews;2020-04-06
4. Research progress of high-precision surface metrology of a K-B mirror;Chinese Optics;2020
5. On the characterization of ultra-precise XUV-focusing mirrors by means of high angular resolution slope-measuring deflectometry;Advances in Metrology for X-Ray and EUV Optics VIII;2019-09-09
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