1. Critical Dimension Measurement In The Scanning Electron Microscope;Postek,1984
2. Hitachi S-6000 Field Emission CD-Measurement SEM;Ohtaka,1986
3. Advanced inspection technique for deep-submicron and high-aspect-ratio contact holes;Matsui,2002
4. Novel SEM Based Imaging Using Secondary Electron Spectrometer for Enhanced Voltage Contrast and Bottom Layer Defect Review;Avinun-Kalish,2009
5. Challenges of SEM metrology at sub-10nm linewidth;Babin,2012