An improved PSO algorithm and its application on model identification of coarse-stage in lithography machine
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SPIE
Reference11 articles.
1. Design, Control of an Aerostatic XY Planar Motion Stage for Precision Positioning[C];Yu,2012
2. Modeling and analysis of a 3-DOF Lorentz-force-driven planar motion stage for nanopositioning
3. Optimization of an impact drive mechanism based on real-coded genetic algorithm
4. A comparison of fitness functions for the identification of a piezoelectric hysteretic actuator based on the real-coded genetic algorithm
5. Optimization of a phase stabilization controller for an ultra-precision positioning stage using a structured genetic algorithm[J];Yang,2012
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