Author:
Wu Tsung-Ta (Alex),Freeman Jill,Elmalk Abdalmohsen,Chang Li Yun,Liu Tsung Hsien,Chang Yi-Hsin,Hsieh Max
Reference9 articles.
1. Lithographic stochastics: beyond 3σ;Bristol;JM3,2017
2. Impact of local variability on defect aware process windows;Maslow,2019
3. Stochastic effects in EUV lithography: random, local CD variability, and printing failures;De Bisschop;JM3,2017
4. Advances in edge placement error metrology in the era of stochastics
5. Assessment of stochastic fail rate using E-beam massive metrology