Sn DPP source-collector modules: status of alpha resources, beta developments, and the scalability to HVM-Reference-Cited by-同舟云学术

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Sn DPP source-collector modules: status of alpha resources, beta developments, and the scalability to HVM

Published:2008-03-14 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
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Author:

Corthout Marc,Apetz Rolf,Brudermann Jesko,Damen Marcel,Derra Günther,Franken Oliver,Jonkers Jeroen,Klein Jürgen,Küpper Felix,Mader Arnaud,Neff Willi,Scheuermann Hans,Schriever Guido,Schürmann Max,Seimons Guido,Snijkers Rob,Vaudrevange Dominik,Wagenaars Erik,van de Wel Peiter,Yoshioka Masaki,Zink Peter,Zitzen Oliver

Publisher

SPIE

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Influence of a laser intensity on EUV brightness and ion speed from a laser-assisted discharge-produced plasma;Applied Physics Letters;2024-01-15

2. Brilliance scaling of discharge sources for extreme-ultraviolet and soft x-ray radiation for metrology applications;Journal of Micro/Nanolithography, MEMS, and MOEMS;2012-06-15

3. Angular ion emission characteristics of a laser triggered tin vacuum arc as light source for extreme ultraviolet lithography;Journal of Applied Physics;2010-11

4. Development and performance of grazing and normal incidence collectors for the HVM DPP and LPP sources;SPIE Proceedings;2010-03-11

5. Creation and investigation of powerful EUV sources (λ ≈ 13.5 nm);Plasma Physics Reports;2010-03

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