Airborne molecular contamination: quality criterion for laser and optical components-Reference-Cited by-同舟云学术

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Airborne molecular contamination: quality criterion for laser and optical components

Published:2015-02-20 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
Short-container-title:

Author:

Otto Michael

Publisher

SPIE

Reference23 articles.

1. Organic Airborne Molecular Contamination in Semiconductor Fabrication Clean Rooms

2. Airborne Molecular Contamination

3. Airborne molecular contamination: clean-room control strategies;Higley,1996

4. Cost effective amc control strategy for semiconductor manufacturing;Kummerle,1999

5. Volatile Cleanroom Contaminants-Sources and Detection;Muller,1994

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1. Investigation of laser-induced contamination on dielectric thin films in MHz sub-ps regime;Advanced Optical Technologies;2024-01-04

2. Development of a detection system for gas-phase aromatics and other molecules ionizable by soft X-rays demonstrated using methyl salicylate;Aerosol Science and Technology;2023-04-27

3. Sub-ps MHz green laser-induced contamination on dielectric coatings in air;Laser-Induced Damage in Optical Materials 2022;2022-12-02

4. Effects of volatile organic contamination on the performance of dielectric film;Optical Materials;2022-12

5. Analysis of laser-induced contamination at 515 nm in the sub-ps/MHz regime;Optical Engineering;2020-11-05

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