Enabling nanoimprint simulator for quality verification: process-design co-optimization toward high-volume manufacturing
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Published:2022-01-04
Issue:01
Volume:21
Page:
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ISSN:2708-8340
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Container-title:Journal of Micro/Nanopatterning, Materials, and Metrology
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language:
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Short-container-title:J. Micro/Nanopattern. Mats. Metro.
Author:
Seki Junichi1,
Oguchi Yuichiro1,
Kiyohara Naoki1,
Suzuki Koshiro1,
Nagane Kohei1,
Narioka Shintaro2,
Nakayama Takahiro2,
Shiode Yoshihiro2,
Aihara Sentaro2,
Asano Toshiya2
Affiliation:
1. Canon Inc., Tokyo
2. Canon Inc., Tochigi
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Arts and Humanities