Research on high-precision polarized laser interferometer-Reference-Cited by-同舟云学术

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Research on high-precision polarized laser interferometer

Published:2017-03-08 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
Short-container-title:

Author:

Wu Wanduo¹,Wu Tingting¹,Huang Qiangxian¹,Wang Chaoqun¹,Zhang Rui¹

Affiliation:

1. Hefei Univ. of Technology (China)

Publisher

SPIE

Reference10 articles.

1. Review of High-resolution Measuring Method of Displacement Using Laser Interferometer;Duan;Metrology & Measurement Technology.,2012

2. A laser measurement system for the high-precision calibration of displacement transducers

3. Review on long-range and ultrahigh-accuracy nanometer measurement;Wei;Opt. Techn.,2005

4. Design and Experimental Study of Polarimetric Interferometric Nanopositioning System;Xu;Chinese Journal of Sensors and Actuators.,2013

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