MEMS FTIR optical spectrometer enables detection of volatile organic compounds (VOCs) in part-per-billion (ppb) range for air quality monitoring-Reference-Cited by-同舟云学术

MEMS FTIR optical spectrometer enables detection of volatile organic compounds (VOCs) in part-per-billion (ppb) range for air quality monitoring

Published:2019-03-04 Issue: Volume: Page:
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Container-title:MOEMS and Miniaturized Systems XVIII
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Author:

Fathy Alaa,Sabry Yasser M.,Amr Mariam,Capo-Chichi Martine,Anwar Momen,Ghoname Amr O.,Elsayed Ahmed A.,Saeed Ahmed,Gad Mina,H. Al Haron Mohamed,Erfan Mazen,Leprince-Wang Yamin,Saadany Bassam,Khalil Diaa A. M.,Bourouina Tarik

Publisher

SPIE

Reference13 articles.

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2. On-Chip Micro–Electro–Mechanical System Fourier Transform Infrared (MEMS FT-IR) Spectrometer-Based Gas Sensing

3. MEMS-based compact FT-spectrometers - a platform for spectroscopic mid-infrared sensors

4. MEMS infrared gas spectrometer based on a porous silicon tunable filter

5. Environmental mid-infrared gas sensing using MEMS FTIR spectrometer;Erfan;MOEMS and Miniaturized Systems XVI,2017

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